The InnoEUV project aims to develop a novel approach for generating coherent, laser-like extreme ultraviolet (EUV) radiation at a wavelength of 13.5 nanometers with unprecedented performance. This new technology promises significantly higher output power, opening up new possibilities for spectroscopy, metrology, and imaging.

Active Fiber Systems is proud to be a strategic industrial partner in this innovative collaboration with Helmholtz Institute Jena and GSI Helmholtzzentrum für Schwerionenforschung. Together, we intend to deepen the research of fundamental EUV research and transfer it to broad industrial applications.

Dr. Tino Eidam, CTO of Active Fiber Systems, highlights:

“InnoEUV enables us to translate cutting-edge EUV source concepts into robust and scalable laser systems. Our close collaboration with HI Jena and the early involvement of potential end users ensure that the technologies we develop meet future application needs in metrology and imaging.”

Through projects like InnoEUV, Active Fiber Systems continues to strengthen its role as a leading developer of high-performance laser solutions, supporting to bring next-generation EUV technologies from research laboratories into real-world industrial use.

More information about the project could be found here: https://www.gsi.de/en/start/news/details/2026/03/17/innoeuv

Foto: © Robert Klas